1-100963-01

The SLQ-QT500 features a flow range of up to 120 ml/min for water-based and hydrocarbon-based liquids, such as alcohols, solvents, oil, fuel and adhesives. It is the first choice for measurement of liquids containing particles or with a high viscosity. The SLQ-QT500 in combination with one of the SCC1 sensor cables can be easily integrated into demanding coating systems in the semicon industry, as well as into a wide array of dispensing and liquid flow systems in other industries.

The high sensitivity and measuring speed offers new possibilities for the monitoring and control of fast dispensing processes. The sensor is available with calibrations for H2O and isopropanol (IPA). Due to its micro-thermal measurement principle and large inner diameter, the measurement performance of the SLQ-QT500 does not depend on the viscosity itself, and so there is no strict upper or lower viscosity limit (e.g. kinematic viscosities of up to ~1000 mm2/s). It is also ideal for liquids that contain small particles, as long as they do not abrade the quartz glass tube.

For wetted parts, only PFA for the fittings and quartz glass for the inner flow channel have been chosen. As with all other Sensirion liquid flow meters, this reliable device has no moving parts and measures through the wall of a straight flow path.